1291 MKS Instruments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ressure Controller FS G PC with Flow Sensor G Series EtherCAT PC W FLOW 3000 5000 5000 200 100 2000 true PC 5003 2037 #xa0 #x4a0 Moment of inertia g cm^2 #xa1 #x4a1 revolution speed rad/s #xa3 #x4a3 Increments inc #x22 #x422 Pascal P #xa0 #x4a0 Normalized Pressure FFS #x41 #x441 Angle Degree deg #xa1 #x4a1 Torr T #xa3 #x4a3 Pounds per square inch absolute psia #xa2 #x4a2 Atmosphere atm #xc0 #x4c0 Percent % BIT2 2 BOOL 1 BYTE 8 DINT 32 INT 16 REAL 32 UDINT 32 UINT 16 ULINT 64 USINT 8 STRING(7) 56 STRING(3) 24 STRING(5) 40 DT1018 144 0 SubIndex 000 USINT 8 0 ro 1 Vendor ID UDINT 32 16 ro 2 Product code UDINT 32 48 ro 3 Revision UDINT 32 80 ro 4 Serial number UDINT 32 112 ro DT1600 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT1601 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT1A00 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT1A01 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT1C00ARR USINT 32 1 4 DT1C00 48 0 SubIndex 000 USINT 8 0 ro Elements DT1C00ARR 32 16 ro DT1C12ARR UINT 32 1 2 DT1C12 48 0 SubIndex 000 USINT 8 0 rw Elements DT1C12ARR 32 16 rw DT1C13ARR UINT 32 1 2 DT1C13 48 0 SubIndex 000 USINT 8 0 rw Elements DT1C13ARR 32 16 rw DT1C32 257 0 SubIndex 000 USINT 8 0 ro 1 Synchronization Type UINT 16 16 rw 2 Cycle Time UDINT 32 32 ro 4 Synchronization Types supported UINT 16 64 ro 5 Minimum Cycle Time UDINT 32 80 ro 6 Calc and Copy Time UDINT 32 112 ro 8 Get Cycle Time UINT 16 144 rw 9 Delay Time UDINT 32 160 ro 10 Sync0 Cycle Time UDINT 32 192 rw 11 SM-Event Missed UINT 16 224 ro 12 Cycle Time Too Small UINT 16 240 ro 32 Sync Error BOOL 1 256 ro DT1C33 257 0 SubIndex 000 USINT 8 0 ro 1 Synchronization Type UINT 16 16 rw 2 Cycle Time UDINT 32 32 ro 4 Synchronization Types supported UINT 16 64 ro 5 Minimum Cycle Time UDINT 32 80 ro 6 Calc and Copy Time UDINT 32 112 ro 8 Get Cycle Time UINT 16 144 rw 9 Delay Time UDINT 32 160 ro 10 Sync0 Cycle Time UDINT 32 192 rw 11 SM-Event Missed UINT 16 224 ro 12 Cycle Time Too Small UINT 16 240 ro 32 Sync Error BOOL 1 256 ro DT6000 48 0 SubIndex 000 USINT 8 0 ro 1 Flow REAL 32 16 ro T DT6001 48 0 SubIndex 000 USINT 8 0 ro 1 Pressure REAL 32 16 ro T DT6002 48 0 SubIndex 000 USINT 8 0 ro 1 Temperature REAL 32 16 ro T DT6004 32 0 SubIndex 000 USINT 8 0 ro 1 Flow INT 16 16 ro T DT6005 32 0 SubIndex 000 USINT 8 0 ro 1 Pressure INT 16 16 ro T DT6009 48 0 SubIndex 000 USINT 8 0 ro 1 Vlv Current Readback REAL 32 16 rw DT600F 22 0 SubIndex 000 USINT 8 0 ro 1 Service In Progress BOOL 1 16 ro 2 Invalid Data Input BOOL 1 17 ro 3 Ramp Active BOOL 1 18 ro 4 Vlv Control - Open BOOL 1 19 ro 5 Vlv Control - Closed BOOL 1 20 ro 6 Vlv Control Position BOOL 1 21 ro DT7003 48 0 SubIndex 000 USINT 8 0 ro 1 Setpoint REAL 32 16 rw R DT7007 32 0 SubIndex 000 USINT 8 0 ro 1 Setpoint INT 16 16 rw R DT7008 48 0 SubIndex 000 USINT 8 0 ro 1 Ramp Rate UDINT 32 16 rw R DT7009 24 0 SubIndex 000 USINT 8 0 ro 1 Control Mode USINT 8 16 rw DT8000 48 0 SubIndex 000 USINT 8 0 ro 1 Data Unit UDINT 32 16 rw 1 DT8001 48 0 SubIndex 000 USINT 8 0 ro 1 Data Unit UDINT 32 16 rw 1 DT8007 176 0 SubIndex 000 USINT 8 0 ro 1 Kp REAL 32 16 rw 1 2 Ki REAL 32 48 rw 1 3 Kd REAL 32 80 rw 1 4 WindupLL REAL 32 112 rw 1 5 WindupUL REAL 32 144 rw 1 DT8008 48 0 SubIndex 000 USINT 8 0 ro 1 Max Ramp UDINT 32 16 rw 1 DT8009 24 0 SubIndex 000 USINT 8 0 ro 1 Safe State USINT 8 16 rw 1 DT800A 24 0 SubIndex 000 USINT 8 0 ro 1 Active Gas USINT 8 16 rw 1 DT9000 48 0 SubIndex 000 USINT 8 0 ro 1 Flow Offset REAL 32 16 ro 1 DT9001 144 0 SubIndex 000 USINT 8 0 ro 1 Pressure Fullscale REAL 32 16 ro 1 2 Pressure Offset REAL 32 48 ro 1 3 Pressure High Alarm REAL 32 80 ro 1 4 Pressure Low Alarm REAL 32 112 ro 1 DT9002 112 0 SubIndex 000 USINT 8 0 ro 1 Temperature Fullscale REAL 32 16 ro 1 2 Temperature High Alarm REAL 32 48 ro 1 3 Temperature Low Alarm REAL 32 80 ro 1 DT9003 24 0 SubIndex 000 USINT 8 0 ro 1 Direction USINT 8 16 ro 1 DT9008 48 0 SubIndex 000 USINT 8 0 ro 1 Min Ramp Time UDINT 32 16 ro 1 STRING(20) 8 STRING(12) 8 ARRAY [0..159] OF BYTE BYTE 1280 0 160 DT900A 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 1 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DT900B 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 1 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DT900C 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 1 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DT900D 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DT900E 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 1 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DT900F 2041 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 1 2 Gas Standard Number UINT 16 17 ro 1 3 Symbol STRING(20) 160 33 ro 1 4 Name STRING(20) 160 193 ro 1 5 Min Fullscale REAL 32 353 ro 1 6 Max Fullscale REAL 32 385 ro 1 7 Fullscale REAL 32 417 ro 1 8 Min Flow SP REAL 32 449 ro 1 9 Max Flow SP REAL 32 481 ro 1 10 Bin ID UINT 16 513 ro 1 11 Gas Cal File Rev UINT 16 529 ro 1 12 Gas Table Rev UINT 16 545 ro 1 13 Factory Cal Date STRING(12) 96 561 ro 1 14 Last Cal Date STRING(12) 96 657 ro 1 15 Number Of Cal Points USINT 8 753 ro 1 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 761 ro 1 DTF000 48 0 SubIndex 000 USINT 8 0 ro 1 Module index distance UINT 16 16 ro 2 Maximum number of modules UINT 16 32 ro DTF010ARR UDINT 32 1 1 DTF010 48 0 SubIndex 000 USINT 8 0 ro Elements DTF010ARR 32 16 ro DTF030ARR UDINT 32 1 1 DTF030 48 0 SubIndex 000 USINT 8 0 ro Elements DTF030ARR 32 16 rw DTF050ARR UDINT 32 1 1 DTF050 48 0 SubIndex 000 USINT 8 0 ro Elements DTF050ARR 32 16 ro DTF381ARR UDINT 32 1 1 DTF381 48 0 SubIndex 000 USINT 8 0 ro Elements DTF381ARR 32 16 ro DTF383ARR UDINT 32 1 1 DTF383 48 0 SubIndex 000 USINT 8 0 ro Elements DTF383ARR 32 16 ro DTF391ARR UDINT 32 1 1 DTF391 48 0 SubIndex 000 USINT 8 0 ro Elements DTF391ARR 32 16 ro DTF393ARR UDINT 32 1 1 DTF393 48 0 SubIndex 000 USINT 8 0 ro Elements DTF393ARR 32 16 ro DTF3A1ARR UDINT 32 1 1 DTF3A1 48 0 SubIndex 000 USINT 8 0 ro Elements DTF3A1ARR 32 16 rw DTF3A3ARR UDINT 32 1 1 DTF3A3 48 0 SubIndex 000 USINT 8 0 ro Elements DTF3A3ARR 32 16 rw DTF6F0ARR UDINT 32 1 1 DTF6F0 48 0 SubIndex 000 USINT 8 0 ro Elements DTF6F0ARR 32 16 ro STRING(25) 200 DTF9F1ARR UDINT 32 1 1 DTF9F1 48 0 SubIndex 000 USINT 8 0 ro Elements DTF9F1ARR 32 16 ro DTF9F2ARR UDINT 32 1 1 DTF9F2 48 0 SubIndex 000 USINT 8 0 ro Elements DTF9F2ARR 32 16 ro DTF9F4ARR STRING(25) 200 1 1 DTF9F4 216 0 SubIndex 000 USINT 8 0 ro Elements DTF9F4ARR 200 16 ro DTF9F5ARR USINT 8 1 1 DTF9F5 24 0 SubIndex 000 USINT 8 0 ro Elements DTF9F5ARR 8 16 rw ARRAY [0..1] OF BYTE BYTE 16 0 2 DTFB10 72 0 SubIndex 000 USINT 8 0 ro 1 Target REAL 32 16 rw 2 Status USINT 8 48 ro 3 Response ARRAY [0..1] OF BYTE 16 56 rw DTFB11 56 0 SubIndex 000 USINT 8 0 ro 1 Target REAL 32 16 rw 2 Status USINT 8 48 ro ARRAY [0..5] OF BYTE BYTE 48 0 6 ARRAY [0..0] OF BYTE BYTE 8 0 1 DTFBF0 80 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..5] OF BYTE 48 16 rw 2 Status USINT 8 64 ro 3 Response ARRAY [0..0] OF BYTE 8 72 rw ARRAY [0..4] OF BYTE BYTE 40 0 5 DTFBF1 72 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..4] OF BYTE 40 16 rw 2 Status USINT 8 56 ro 3 Response ARRAY [0..0] OF BYTE 8 64 rw ARRAY [0..3] OF BYTE BYTE 32 0 4 DTFBF2 64 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..3] OF BYTE 32 16 rw 2 Status USINT 8 48 ro 3 Response ARRAY [0..0] OF BYTE 8 56 rw ARRAY [0..24] OF BYTE BYTE 200 0 25 DTFBF3 256 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..3] OF BYTE 32 16 rw 2 Status USINT 8 48 ro 3 Response ARRAY [0..24] OF BYTE 200 56 rw #x1000 Device type UDINT 32 ro #x1001 Error register USINT 8 ro #x1008 Device name STRING(7) 56 ro #x1009 Hardware version STRING(3) 24 ro #x100a Software version STRING(5) 40 ro #x1018 Identity DT1018 144 SubIndex 000 Vendor ID Product code Revision Serial number ro #x10f8 Timestamp ULINT 64 ro #x1600 PC default RxPDO-Map DT1600 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1601 PC user RxPDO-Map DT1601 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1a00 PC default TxPDO-Map DT1A00 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1a01 PC user TxPDO-Map DT1A01 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1c00 Sync manager type DT1C00 48 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 ro #x1c12 RxPDO assign DT1C12 48 SubIndex 000 SubIndex 001 SubIndex 002 rw #x1c13 TxPDO assign DT1C13 48 SubIndex 000 SubIndex 001 SubIndex 002 rw #x1c32 SM output parameter DT1C32 257 SubIndex 000 Synchronization Type Cycle Time Synchronization Types supported Minimum Cycle Time Calc and Copy Time Get Cycle Time Delay Time Sync0 Cycle Time SM-Event Missed Cycle Time Too Small Sync Error ro #x1c33 SM input parameter DT1C33 257 SubIndex 000 Synchronization Type Cycle Time Synchronization Types supported Minimum Cycle Time Calc and Copy Time Get Cycle Time Delay Time Sync0 Cycle Time SM-Event Missed Cycle Time Too Small Sync Error ro #x6000 Flow Real DT6000 48 SubIndex 000 Flow ro #x6001 Pressure Real DT6001 48 SubIndex 000 Pressure ro #x6002 Temperature Real DT6002 48 SubIndex 000 Temperature ro #x6004 Flow Int DT6004 32 SubIndex 000 Flow ro #x6005 Pressure Int DT6005 32 SubIndex 000 Pressure ro #x6009 Actuator Readback DT6009 48 SubIndex 000 Vlv Current Readback ro #x600f Status DT600F 22 SubIndex 000 Service In Progress Invalid Data Input Ramp Active Vlv Control - Open Vlv Control - Closed Vlv Control Position ro #x7003 Pressure Setpoint Real DT7003 48 SubIndex 000 Setpoint ro #x7007 Pressure Setpoint Int DT7007 32 SubIndex 000 Setpoint ro #x7008 Controller Ramp Time DT7008 48 SubIndex 000 Ramp Rate ro #x7009 Actuator Control DT7009 24 SubIndex 000 Control Mode ro #x8000 Flow Data Unit DT8000 48 SubIndex 000 Data Unit ro #x8001 Pressure Data Unit DT8001 48 SubIndex 000 Data Unit ro #x8007 Controller PID Settings DT8007 176 SubIndex 000 Kp Ki Kd WindupLL WindupUL ro #x8008 Max Ramp Time DT8008 48 SubIndex 000 Max Ramp ro #x8009 Safe State DT8009 24 SubIndex 000 Safe State ro #x800a Active Gas Index DT800A 24 SubIndex 000 Active Gas ro #x9000 Flow Zero Offset DT9000 48 SubIndex 000 Flow Offset ro #x9001 Pressure DT9001 144 SubIndex 000 Pressure Fullscale Pressure Offset Pressure High Alarm Pressure Low Alarm ro #x9002 Temperature DT9002 112 SubIndex 000 Temperature Fullscale Temperature High Alarm Temperature Low Alarm ro #x9003 Controller DT9003 24 SubIndex 000 Direction ro #x9008 Minimum Ramp Time DT9008 48 SubIndex 000 Min Ramp Time ro #x900a Gas Instance - 1 DT900A 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #x900b Gas Instance - 2 DT900B 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #x900c Gas Instance - 3 DT900C 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #x900d Gas Instance - 4 DT900D 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #x900e Gas Instance - 5 DT900E 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #x900f Gas Instance - Factory DT900F 2041 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro #xf000 Modular device profile DTF000 48 SubIndex 000 Module index distance Maximum number of modules ro #xf010 Modules Profile List DTF010 48 SubIndex 000 SubIndex 001 ro #xf030 Configured Ident Module List DTF030 48 SubIndex 000 SubIndex 001 ro #xf050 Detected Ident Module List DTF050 48 SubIndex 000 SubIndex 001 ro #xf380 Exception Status USINT 8 ro T #xf381 Active Device Warning Details DTF381 48 SubIndex 000 SubIndex 001 ro #xf383 Active Device Error Details DTF383 48 SubIndex 000 SubIndex 001 ro #xf390 Latched Exceptions USINT 8 ro #xf391 Latched Device Warning Details DTF391 48 SubIndex 000 SubIndex 001 ro #xf393 Latched Device Error Details DTF393 48 SubIndex 000 SubIndex 001 ro #xf3a1 Device Exception Warning Mask DTF3A1 48 SubIndex 000 SubIndex 001 ro #xf3a3 Device Exception Error Mask DTF3A3 48 SubIndex 000 SubIndex 001 ro #xf6f0 Input Latch Local Timestamp DTF6F0 48 SubIndex 000 SubIndex 001 ro #xf9f0 Serial Number STRING(25) 200 ro #xf9f1 CDP Functional Gen. Number DTF9F1 48 SubIndex 000 SubIndex 001 ro #xf9f2 SDP Functional Gen. Number DTF9F2 48 SubIndex 000 SubIndex 001 ro #xf9f3 Vendor Name STRING(25) 200 ro #xf9f4 Semi SDP Device Name DTF9F4 216 SubIndex 000 SubIndex 001 ro #xf9f5 Data ID DTF9F5 24 SubIndex 000 SubIndex 001 ro #xf9f8 FW Functional Gen. Number UDINT 32 ro #xfb10 Flow Zero Service DTFB10 72 SubIndex 000 Target Status Response ro #xfb11 Pressure Zero Service DTFB11 56 SubIndex 000 Target Status ro #xfbf0 Reset Service DTFBF0 80 SubIndex 000 Command Status Response ro #xfbf1 Exception Reset Service DTFBF1 72 SubIndex 000 Command Status Response ro #xfbf2 NV Save Service DTFBF2 64 SubIndex 000 Command Status Response ro #xfbf3 NV Checksum Service DTFBF3 256 SubIndex 000 Command Status Response ro Outputs Inputs MBoxOut MBoxIn Outputs Inputs #x1600 Outputs (Default) #x7003 1 32 Pressure SP REAL #x7009 01 8 Actuator Control USINT #x0 0 32 Position SP REAL #x7008 1 32 RampTime UDINT #x1601 Outputs (User) #x1a00 Inputs ( Default) #xF380 0 8 Active Exception Status USINT #x6001 1 32 Pressure Reading REAL #x6009 1 32 Actuator Current REAL #x6000 1 32 Flow Reading REAL #x1a01 Inputs (User) 0 2048 0506034464000000050000000000 00100C0200180C02