1291 MKS Instruments 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MFC Mass Flow Controller G Series MFC G Series EtherCAT MFC 3000 5000 5000 200 100 2000 true MFC 5003 2021 BOOL 1 DINT 32 ULINT 64 REAL 32 UDINT 32 INT 16 UINT 16 USINT 8 BYTE 8 DT1C12ARR UINT 32 1 2 DT1C12 48 0 SubIndex 000 USINT 8 0 rw Elements DT1C12ARR 32 16 rw DT1C13ARR UINT 32 1 2 DT1C13 48 0 SubIndex 000 USINT 8 0 rw Elements DT1C13ARR 32 16 rw DT7009 24 0 SubIndex 000 USINT 8 0 ro 1 Control Mode USINT 8 16 rw ARRAY [0..3] OF BYTE BYTE 32 0 4 ARRAY [0..24] OF BYTE BYTE 200 0 25 DTFBF3 256 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..3] OF BYTE 32 16 rw 2 Status USINT 8 48 ro 3 Response ARRAY [0..24] OF BYTE 200 56 rw DT8008 48 0 SubIndex 000 USINT 8 0 ro 1 Max Ramp UDINT 32 16 rw ARRAY [0..0] OF BYTE BYTE 8 0 1 DTFBF2 64 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..3] OF BYTE 32 16 rw 2 Status USINT 8 48 ro 3 Response ARRAY [0..0] OF BYTE 8 56 rw ARRAY [0..4] OF BYTE BYTE 40 0 5 DTFBF1 72 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..4] OF BYTE 40 16 rw 2 Status USINT 8 56 ro 3 Response ARRAY [0..0] OF BYTE 8 64 rw STRING(9) 72 STRING(3) 24 STRING(5) 40 DT9000 48 0 SubIndex 000 USINT 8 0 ro 1 Flow Offset REAL 32 16 ro DT9008 48 0 SubIndex 000 USINT 8 0 ro 1 Min Ramp Time UDINT 32 16 ro DT900A 2048 0 SubIndex 000 USINT 8 0 ro 1 Index BOOL 1 16 ro 2 Gas Standard Number UINT 16 24 ro 3 Symbol STRING(20) 160 40 ro 4 Name STRING(20) 160 200 ro 5 Min Fullscale REAL 32 360 ro 6 Max Fullscale REAL 32 392 ro 7 Fullscale REAL 32 424 ro 8 Min Flow SP REAL 32 456 ro 9 Max Flow SP REAL 32 488 ro 10 Bin ID UINT 16 520 ro 11 Gas Cal File Rev UINT 16 536 ro 12 Gas Table Rev UINT 16 552 ro 13 Factory Cal Date STRING(12) 96 568 ro 14 Last Cal Date STRING(12) 96 664 ro 15 Number Of Cal Points USINT 8 760 ro 16 Cardinal Points ARRAY [0..159] OF BYTE 1280 768 ro DT7003 48 0 SubIndex 000 USINT 8 0 ro 1 Setpoint REAL 32 16 rw r DT8009 24 0 SubIndex 000 USINT 8 0 ro 1 Safe State USINT 8 16 rw ARRAY [0..5] OF BYTE BYTE 48 0 6 DTFBF0 80 0 SubIndex 000 USINT 8 0 ro 1 Command ARRAY [0..5] OF BYTE 48 16 rw 2 Status USINT 8 64 ro 3 Response ARRAY [0..0] OF BYTE 8 72 rw DTFB10 232 0 SubIndex 000 USINT 8 0 ro 1 Target ARRAY [0..24] OF BYTE 200 16 rw 2 Status USINT 8 216 ro 3 Response ARRAY [0..0] OF BYTE 8 224 rw STRING(25) 200 DT1600 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT600F 24 0 SubIndex 000 USINT 8 0 ro 1 Service In Progress BOOL 1 16 ro 2 Invalid Data Input BOOL 1 17 ro 3 Ramp Active BOOL 1 18 ro 4 Vlv Control - Open BOOL 1 19 ro 5 Vlv Control - Closed BOOL 1 20 ro 6 Vlv Control Position BOOL 1 21 ro DT800A 24 0 SubIndex 000 USINT 8 0 ro 1 Active Gas USINT 8 16 rw DT1601 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DT1C32 392 0 SubIndex 000 USINT 8 0 ro 1 Sync mode UINT 16 16 rw 2 Cycle time UDINT 32 32 ro 3 Shift time UDINT 32 64 ro 4 Sync modes supported UINT 16 96 ro 5 Minimum cycle time UDINT 32 112 ro 6 Calc and copy time UDINT 32 144 ro 7 Reserved UDINT 32 176 rw 8 Get Cycle Time UINT 16 208 rw 9 Delay time UDINT 32 224 ro 10 Sync0 time UDINT 32 256 rw 11 SM event missed counter UDINT 32 288 ro 12 Cycle exceeded counter UDINT 32 320 ro 13 Shift too short counter UDINT 32 352 ro 32 Sync error BOOL 1 384 ro DT1C33 392 0 SubIndex 000 USINT 8 0 ro 1 Sync mode UINT 16 16 rw 2 Cycle time UDINT 32 32 ro 3 Shift time UDINT 32 64 ro 4 Sync modes supported UINT 16 96 ro 5 Minimum cycle time UDINT 32 112 ro 6 Calc and copy time UDINT 32 144 ro 7 Reserved UDINT 32 176 rw 8 Get Cycle Time UINT 16 208 rw 9 Delay time UDINT 32 224 ro 10 Sync0 time UDINT 32 256 rw 11 Cycle exceeded counter UDINT 32 288 ro 12 SM event missed counter UDINT 32 320 ro 13 Shift too short counter UDINT 32 352 ro 32 Sync error BOOL 1 384 ro DT1A00 112 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw STRING(20) 160 STRING(12) 96 ARRAY [0..159] OF BYTE BYTE 1280 0 160 DT6000 48 0 SubIndex 000 USINT 8 0 ro 1 Flow REAL 32 16 ro t DT6004 32 0 SubIndex 000 USINT 8 0 ro 1 Flow INT 16 16 ro t DTF381ARR UDINT 32 1 1 DTF381 48 0 SubIndex 000 USINT 8 0 ro Elements DTF381ARR 32 16 ro DTF391ARR UDINT 32 1 1 DTF391 48 0 SubIndex 000 USINT 8 0 ro Elements DTF391ARR 32 16 ro DT1A01 144 0 SubIndex 000 USINT 8 0 rw 1 SubIndex 001 UDINT 32 16 rw 2 SubIndex 002 UDINT 32 48 rw 3 SubIndex 003 UDINT 32 80 rw 4 SubIndex 004 UDINT 32 112 rw DTF9F2ARR UDINT 32 1 1 DTF9F2 48 0 SubIndex 000 USINT 8 0 ro Elements DTF9F2ARR 32 16 ro DTF9F1ARR UDINT 32 1 1 DTF9F1 48 0 SubIndex 000 USINT 8 0 ro Elements DTF9F1ARR 32 16 ro DTF3A3ARR UDINT 32 1 1 DTF3A3 48 0 SubIndex 000 USINT 8 0 ro Elements DTF3A3ARR 32 16 rw DTF3A1ARR UDINT 32 1 1 DTF3A1 48 0 SubIndex 000 USINT 8 0 ro Elements DTF3A1ARR 32 16 rw DT1C00ARR USINT 32 1 4 DT1C00 48 0 SubIndex 000 USINT 8 0 ro Elements DT1C00ARR 32 16 ro DTF383ARR UDINT 32 1 1 DTF383 48 0 SubIndex 000 USINT 8 0 ro Elements DTF383ARR 32 16 ro DT7008 48 0 SubIndex 000 USINT 8 0 ro 1 Ramp Rate UDINT 32 16 rw r DTF9F4ARR BYTE 200 1 1 DTF9F4 216 0 SubIndex 000 USINT 8 0 ro Elements DTF9F4ARR 200 16 ro DT6009 48 0 SubIndex 000 USINT 8 0 ro 1 Vlv Current Readback REAL 32 16 rw DT8000 48 0 SubIndex 000 USINT 8 0 ro 1 Data Unit UDINT 32 16 rw DTF393ARR UDINT 32 1 1 DTF393 48 0 SubIndex 000 USINT 8 0 ro Elements DTF393ARR 32 16 ro DTF000 48 0 SubIndex 000 USINT 8 0 ro 1 Module index distance UINT 16 16 ro 2 Maximum number of modules UINT 16 32 ro DTF010ARR UDINT 32 1 1 DTF010 48 0 SubIndex 000 USINT 8 0 ro Elements DTF010ARR 32 16 ro DTF9F5ARR USINT 8 1 1 DTF030ARR UDINT 32 1 1 DTF030 48 0 SubIndex 000 USINT 8 0 ro Elements DTF030ARR 32 16 ro DTF050ARR UDINT 32 1 1 DTF050 48 0 SubIndex 000 USINT 8 0 ro Elements DTF050ARR 32 16 ro DTF9F5 24 0 SubIndex 000 USINT 8 0 ro Elements DTF9F5ARR 8 16 rw DTF6F0ARR UDINT 32 1 1 DTF6F0 48 0 SubIndex 000 USINT 8 0 ro Elements DTF6F0ARR 32 16 ro DT1018 144 0 SubIndex 000 USINT 8 0 ro 1 Vendor ID UDINT 32 16 ro 2 Product code UDINT 32 48 ro 3 Revision UDINT 32 80 ro 4 Serial number UDINT 32 112 ro DT7007 32 0 SubIndex 000 USINT 16 0 ro 1 Setpoint INT 16 16 rw r #x1000 Device type UDINT 32 8b13e507 ro #x1001 Error register USINT 8 00 ro #x1008 Device name STRING(9) 72 4d4b535f475f4d4643 ro #x1009 Hardware version STRING(3) 24 312e30 ro #x100A Software version STRING(5) 40 ro #x1018 Identity DT1018 144 SubIndex 000 Vendor ID Product code Revision Serial number ro #x10F8 Timestamp ULINT 64 ro #x1600 mfc default RxPDO-Map DT1600 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1601 mfc user RxPDO-Map DT1601 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1A00 mfc default TxPDO-Map DT1A00 112 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 rw #x1A01 mfc user TxPDO-Map DT1A01 144 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 rw #x1C00 Sync manager type DT1C00 48 SubIndex 000 SubIndex 001 SubIndex 002 SubIndex 003 SubIndex 004 ro #x1C12 RxPDO assign DT1C12 48 SubIndex 000 SubIndex 001 SubIndex 002 rw #x1C13 TxPDO assign DT1C13 48 SubIndex 000 SubIndex 001 SubIndex 002 rw #x1C32 SM output parameter DT1C32 392 SubIndex 000 Sync mode Cycle time Shift time Sync modes supported Minimum cycle time Calc and copy time Reserved Get Cycle Time Delay time Sync0 time SM event missed counter Cycle exceeded counter Shift too short counter Sync error ro #x1C33 SM input parameter DT1C33 392 SubIndex 000 Sync mode Cycle time Shift time Sync modes supported Minimum cycle time Calc and copy time Reserved Get Cycle Time Delay time Sync0 time Cycle exceeded counter SM event missed counter Shift too short counter Sync error ro #x6000 Flow Real DT6000 48 SubIndex 000 Flow ro #x6004 Flow Int DT6004 32 SubIndex 000 Flow ro #x6009 Actuator Readback DT6009 48 SubIndex 000 Vlv Current Readback ro #x600F Status DT600F 24 SubIndex 000 Service In Progress Invalid Data Input Ramp Active Vlv Control - Open Vlv Control - Closed Vlv Control Position ro #x7003 Flow Setpoint Real DT7003 48 SubIndex 000 Setpoint ro #x7007 Flow Setpoint Int DT7007 32 SubIndex 000 Setpoint ro #x7008 Controller Ramp Time DT7008 48 SubIndex 000 Ramp Rate ro #x7009 Actuator Control DT7009 24 SubIndex 000 Control Mode ro #x8000 Flow Data Unit DT8000 48 SubIndex 000 Data Unit 0000A000 ro 1 #x8008 Max Ramp Time DT8008 48 SubIndex 000 Max Ramp 60EA0000 ro 1 #x8009 Safe State DT8009 24 SubIndex 000 Safe State 00 ro 1 #x800A Active Gas Index DT800A 24 SubIndex 000 Active Gas 01 ro 1 #x9000 Flow Zero Offset DT9000 48 SubIndex 000 Flow Offset 00000000 ro 1 #x9008 Minimum Ramp Time DT9008 48 SubIndex 000 Min Ramp Time 32000000 ro 1 #x900A Gas Instance - 1 DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #x900B Gas Instance - 2 DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #x900C Gas Instance - 3 DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #x900D Gas Instance - 4 DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #x900E Gas Instance - 5 DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #x900F Gas Instance - Factory DT900A 2048 SubIndex 000 Index Gas Standard Number Symbol Name Min Fullscale Max Fullscale Fullscale Min Flow SP Max Flow SP Bin ID Gas Cal File Rev Gas Table Rev Factory Cal Date Last Cal Date Number Of Cal Points Cardinal Points ro 1 #xF000 Modular device profile DTF000 48 SubIndex 000 Module index distance Maximum number of modules ro #xF010 Modules Profile List DTF010 48 SubIndex 000 SubIndex 001 ro #xF030 Configured Ident Module List DTF030 48 SubIndex 000 SubIndex 001 ro #xF050 Detected Ident Module List DTF050 48 SubIndex 000 SubIndex 001 ro #xF380 Exception Status USINT 8 ro T #xF381 Active Device Warning Details DTF381 48 SubIndex 000 SubIndex 001 ro #xF383 Active Device Error Details DTF383 48 SubIndex 000 SubIndex 001 ro #xF390 Latched Exceptions USINT 8 ro #xF391 Latched Device Warning Details DTF391 48 SubIndex 000 SubIndex 001 ro #xF393 Latched Device Error Details DTF393 48 SubIndex 000 SubIndex 001 #xF3A1 Device Exception Warning Mask DTF3A1 48 SubIndex 000 SubIndex 001 ro #xF3A3 Device Exception Error Mask DTF3A3 48 SubIndex 000 SubIndex 001 ro #xF610 Temperature - Deg C REAL 32 ro #xF6F0 Input Latch Local Timestamp DTF6F0 48 SubIndex 000 SubIndex 001 ro #xF9F0 Serial Number STRING(25) 200 ro #xF9F1 CDP Functional Gen. Number DTF9F1 48 SubIndex 000 SubIndex 001 ro #xF9F2 SDP Functional Gen. Number DTF9F2 48 SubIndex 000 SubIndex 001 ro #xF9F3 Vendor Name STRING(25) 200 ro #xF9F4 Semi SDP Device Name DTF9F4 216 SubIndex 000 SubIndex 001 ro #xF9F5 Data ID DTF9F5 24 SubIndex 000 SubIndex 001 ro #xF9F8 FW Functional Gen. Number UDINT 32 ro #xFB10 Flow Zero Service DTFB10 232 SubIndex 000 Target Status Response ro #xFBF0 Reset Service DTFBF0 80 SubIndex 000 Command Status Response ro #xFBF1 Exception Reset Service DTFBF1 72 SubIndex 000 Command Status Response ro #xFBF2 NV Save Service DTFBF2 64 SubIndex 000 Command Status Response ro #xFBF3 NV Checksum Service DTFBF3 256 SubIndex 000 Command Status Response ro Outputs Inputs MBoxOut MBoxIn Outputs Inputs #x1600 Outputs (Default) #x7003 1 32 Flow SP REAL #x7009 01 8 Actuator Control USINT #x0 0 32 Position SP REAL #x7008 1 32 RampTime UDINT #x1601 Outputs (User) #x1a00 Inputs ( Default) #xF380 0 8 Active Exception Status USINT #x6000 1 32 Flow Reading REAL #x6009 1 32 Actuator Current REAL #x1a01 Inputs (User) 0 2048 0506034464000000050000000000 00100C0200180C02