#x50B MKS Instruments, Inc. 424DD6020000000000003600000028000000100000000E0000000100180000000000A0020000130B0000130B00000000000000000000F5F2EFEDE3DFF2EDE8F2EDE8EEE7E1E1D5CDF0ECE7F2EDE8F5F3EFF9F8F6F1E8E6EEE7E1EDE3DFF2EDE8F2EDE8E9E1D9E5DBD4E9E1D9E4D7D1E3DAD1E0D5CCE0D5CCE9E1DBE8DCD7E8E0DAE8DCD7E0D5CCE0D5CCE8DCD7E3DAD1E0D5CCDCCFC6E8DCD7F2EDE8ECE6E0F2EDE8ECE6E0F2EDE8F5F2EFE9E1D9F5F2EFE3DAD1F2EDE8ECE6E0F5F2EFE8DCD7F1E8E6ECE6E0FCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCF0ECE7E9E1DBFCFEFCDBCBC3ECE7E1CFBFB1E8E0DACBB9AAECE7E1C8B3A3B69C87F4EEECC2AD9BD4C4B7967053C6B3A2D3C4B8D4C2B8F4EEECB39883C8B4A5B99F8BDFD5CBB99F8BE3DBD3B0937C9B765AF0ECE79F7C61A07E64F1E8E69D7A5FD4C2B8CFBDB1E5DBD4B69C88BBA28FB99F8BE3DBD3B59A84E3DBD3B0937C9B765ABEA6948E6647E9E1DBC2AC9C895E3DD3C4B8D4C2B8F2EDE8B39883C8B4A5B99F8BDFD5CBB59A84E3DBD3B0937C9872558F6646ECE7E1AC8E77A5846BCEBDAFF4EEECF1E8E6FCFEFCE0D0CAECE7E1BEA795CFBFB1AC8E77D4C5B9A382699B765AA07E64D4C5B9A88770ECE6E0A07E63FCFEFCFCFEFCFCFEFCE5DAD4F5F3EFDCCFC5967053B0947F9C785CA88870AC8E77E5DBD4BBA28FD4C5B9967053C2AD9BFCFEFCFCFEFCF5F3EF815431AC8E77FCFEFCFCFEFCFCFEFCFCFEFCF9F8F6AC8E77F0ECE7FCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCDFD5CB7C4C278F6646FCFEFCFCFEFCFCFEFCFCFEFCFCFEFCBDA592F0ECE7FCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCE3DBD37C4C27936C4DFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFC936C4DC2AC9AFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFCFCFEFC Micronode Micronode AS08482G AS08482G 2000 9000 5000 200 100 2000 1 Micronode 5003 1 BYTE 8 UDINT 32 UINT 16 WORD 16 INT 16 USINT 8 ULINT 64 REAL 32 ARRAY [0..1] OF BYTE BYTE 16 0 2 ARRAY [0..3] OF BYTE BYTE 32 0 4 ARRAY [0..4] OF BYTE BYTE 40 0 5 ARRAY [0..5] OF BYTE BYTE 48 0 6 ARRAY [0..127] OF BYTE BYTE 1024 0 128 STRING(4) 32 STRING(5) 40 STRING(6) 48 STRING(7) 56 STRING(10) 80 STRING(11) 88 STRING(12) 96 STRING(20) 160 DT1018 144 0 No of elements USINT 8 0 ro o 1 Vendor Id UDINT 32 16 ro o 2 Product Code UDINT 32 48 ro o 3 Revision Number UDINT 32 80 ro o 4 Serial Number UDINT 32 112 ro o DT16XXARR UDINT 1536 1 48 DT1600 1552 0 No of elements USINT 8 0 ro o SubIndex DT16XXARR 1536 16 ro o DT1601 1552 0 No of elements USINT 8 0 ro o SubIndex DT16XXARR 1536 16 ro o DT1602 1552 0 No of elements USINT 8 0 rw o SubIndex DT16XXARR 1536 16 rw o DT1AXXARR UDINT 1536 1 48 DT1A00 1552 0 No of elements USINT 8 0 ro o SubIndex DT1AXXARR 1536 16 ro o DT1A01 1552 0 No of elements USINT 8 0 ro o SubIndex DT1AXXARR 1536 16 ro o DT1A02 1552 0 No of elements USINT 8 0 ro o SubIndex DT1AXXARR 1536 16 ro o DT1A03 1552 0 No of elements USINT 8 0 rw o SubIndex DT1AXXARR 1536 16 rw o DT1C00ARR USINT 32 1 4 DT1C00 48 0 No of elements USINT 8 0 Elements DT1C00ARR 32 16 ro o DT1C12ARR UINT 64 1 4 DT1C12 80 0 No of elements USINT 8 0 rw o Elements DT1C12ARR 64 16 rw o DT1C13ARR UINT 64 1 4 DT1C13 80 0 No of elements USINT 8 0 rw o Elements DT1C13ARR 64 16 rw o DT1C32 320 0 No of elements USINT 8 0 ro o 1 Synchronization Type UINT 16 16 rw o 2 Cycle Time UDINT 32 32 rw o 4 Synchronization Types Supported UINT 16 96 ro m 5 Minimum Cycle Time UDINT 32 112 ro c 12 Cycle Time Too Small UINT 16 304 ro c DT310XARR BYTE 16 1 2 DT3100 32 0 No of elements USINT 8 0 ro o Elements DT310XARR 16 16 ro o T DT320XARR BYTE 16 1 2 DT3200 32 0 No of elements USINT 8 0 ro o Elements DT320XARR 16 16 rw o R DT3201 32 0 No of elements USINT 8 0 ro o Elements DT320XARR 16 16 ro o DT3202 32 0 No of elements USINT 8 0 ro o Elements DT320XARR 16 16 rw o DT3203 32 0 No of elements USINT 8 0 ro o Elements DT320XARR 16 16 rw o DT33XXARR INT 128 1 8 DT3300 144 0 No of elements USINT 8 0 ro o Elements DT33XXARR 128 16 ro o T DT34XXARR INT 64 1 4 DT3402ARR BYTE 8 1 1 DT3400 80 0 No of elements USINT 8 0 ro o Elements DT34XXARR 64 16 rw o R DT3402 24 0 No of elements USINT 8 0 ro o Analog Output Safe Action DT3402ARR 8 16 rw o DT3403 80 0 No of elements USINT 8 0 ro o Elements DT34XXARR 64 16 rw o DTF000 48 0 No of elements USINT 8 0 ro m 1 Index Distance UINT 16 16 ro m 2 Maximum Number of Modules UINT 16 32 ro m DTF010ARR UDINT 32 1 1 DTF010 48 0 No of elements USINT 8 0 ro m Elements DTF010ARR 32 16 ro m DTF38XARR UDINT 32 1 1 DTF38X 48 0 No of elements USINT 8 0 ro o Elements DTF38XARR 32 16 ro o T DT3810 96 0 No of elements USINT 8 0 ro o 1 3vdc INT 16 16 ro o T 2 24vdc INT 16 32 ro o T 3 5vdc INT 16 48 ro o T 4 +15vdc INT 16 64 ro o T 5 -15vdc INT 16 80 ro o T DTF3AXARR UDINT 32 1 1 DTF3AX 48 0 No of elements USINT 8 0 ro o Elements DTF3AXARR 32 16 rw o 1 DTF500 32 0 No of elements USINT 8 0 ro o 1 Switches WORD 16 16 ro o DTF501 224 0 No of elements USINT 8 0 ro o 1 Key UINT 16 16 rw o 2 Serial Number UDINT 32 32 rw o 3 Part Number STRING(12) 96 64 rw o 4 Hardware Version STRING(6) 48 160 rw o 5 LED States UINT 16 208 rw o DTF503 528 0 No of elements USINT 8 0 ro o 1 POST Result STRING(4) 32 16 ro o 2 Reset Source STRING(4) 32 48 ro o 3 Digital Output Driver STRING(4) 32 80 ro o 4 Digital Input Driver STRING(4) 32 112 ro o 5 Analog Output Driver STRING(4) 32 144 ro o 6 Analog Input Driver STRING(4) 32 176 ro o 7 AIO Calibration STRING(4) 32 208 ro o 8 NVRAM STRING(4) 32 240 ro o 9 Fatal Error STRING(4) 32 272 ro o 10 I2C Appl EEPROM STRING(4) 32 304 ro o 11 I2C EtherCAT EEPROM STRING(4) 32 336 ro o 12 3.3 V STRING(4) 32 368 ro o 13 24 V STRING(4) 32 400 ro o 14 5 V STRING(4) 32 432 ro o 15 15 V Positive STRING(4) 32 464 ro o 16 15 V Negative STRING(4) 32 496 ro o DTF600ARR UDINT 32 1 1 DTF600 48 0 No of elements USINT 8 0 ro o Elements DTF600ARR 32 16 ro o T DTF9F1ARR UDINT 32 1 1 DTF9F1 48 0 No of elements USINT 8 0 ro o Elements DTF9F1ARR 32 16 ro o DTF9F2 48 0 No of elements USINT 8 0 ro o Elements DTF9F1ARR 32 16 ro o DTF9F4ARR STRING(4) 32 1 1 DTF9F4 48 0 No of elements USINT 8 0 ro o Elements DTF9F4ARR 32 16 ro o DTF9F5ARR USINT 8 1 1 DTF9F5 24 0 No of elements USINT 8 0 ro o Elements DTF9F5ARR 8 16 rw o RT DTFBF0 88 0 No of elements USINT 8 0 ro o 1 Command ARRAY [0..5] OF BYTE 48 16 rw o 2 Status USINT 8 64 ro o 3 Response ARRAY [0..1] OF BYTE 16 72 ro o DTFBF1 80 0 No of elements USINT 8 0 ro o 1 Request ARRAY [0..4] OF BYTE 40 16 rw o 2 Status USINT 8 56 ro o 3 Response ARRAY [0..1] OF BYTE 16 64 ro o DTFBF2 72 0 No of elements USINT 8 0 ro o 1 Request ARRAY [0..3] OF BYTE 32 16 rw o 2 Status USINT 8 48 ro o 3 Response ARRAY [0..1] OF BYTE 16 56 ro o DTFBF3 104 0 No of elements USINT 8 0 ro o 1 Request ARRAY [0..3] OF BYTE 32 16 rw o 2 Status USINT 8 48 ro o 3 Response ARRAY [0..5] OF BYTE 48 56 ro o #x1000 Device Type UDINT 32 0000138B ro m #x1008 Device Name STRING(11) 88 4D4943524F4E4F44450000 ro o #x1009 Hardware Version STRING(4) 32 312e3030 ro o #x100a Software Version STRING(5) 40 ro o #x100b Bootloader Version STRING(5) 40 ro o #x1018 Identity DT1018 144 ro o #x1600 MicroComboDigOutRxPDOMap DT1600 1552 ro o #x1601 MicroComboAnOutRxPDOMap DT1601 1552 ro o #x1602 UserConfigurableRxPDOMap DT1602 1552 ro o #x1A00 MicroComboDigInTxPDOMap DT1A00 1552 ro o #x1A01 MicroComboAnInTxPDOMap DT1A01 1552 ro o #x1A03 UserConfigurableTxPDOMap DT1A03 1552 ro o #x10f8 Timestamp ULINT 64 0000000000000000 ro o #x1c00 Sync Manager Communication Type DT1C00 48 ro o #x1c12 Sync Manager RxPDO Assign DT1C12 80 SubIndex 000 02 RxPDO Assign (Mapping 1) 0016 RxPDO Assign (Mapping 2) 0116 RxPDO Assign (Mapping 3) 0000 RxPDO Assign (Mapping 4) 0000 rw o #x1c13 Sync Manager TxPDO Assign DT1C13 80 SubIndex 000 02 TxPDO Assign (Mapping 1) 001a TxPDO Assign (Mapping 2) 011a TxPDO Assign (Mapping 3) 0000 TxPDO Assign (Mapping 4) 0000 rw o #x1c32 Sync Manager Output Parameter DT1C32 320 rw o #x1c33 Sync Manager Input Parameter DT1C32 320 rw o #x3080 Internal Counter UDINT 32 ro o T #x3100 Digital Inputs DT3100 32 ro o #x3200 Digital Outputs DT3200 32 ro o #x3201 Digital Output Status DT3201 32 ro o #x3202 Digital Output Safe Action DT3202 32 ro o #x3203 Digital Output Safe Value DT3203 32 ro o #x3300 Analog Inputs DT3300 144 ro o #x3400 Analog Outputs DT3400 80 ro o #x3402 Analog Output Safe Action DT3402 24 ro o #x3403 Analog Output Safe Value DT3403 80 ro o #x3810 Voltage Monitoring DT3810 96 ro o #x3830 Network Data Average UDINT 32 ro o #x3831 Network Data Minimum UDINT 32 ro o #x3832 Network Data Maximum UDINT 32 ro o #xf000 Semiconductor Device Profile DTF000 48 ro m #xf010 Module Profile List DTF010 48 ro m #xf380 Active Exception Status USINT 8 ro m T #xf381 Active Device Warning Details DTF38X 48 ro m #xf382 Active Manufacturer Warning Details DTF38X 48 ro o #xf383 Active Device Error Details DTF38X 48 ro m #xf384 Active Manufacturer Error Details DTF38X 48 ro o #xf390 Latched Exception Status USINT 8 ro m T #xf391 Latched Device Warn Details DTF38X 48 ro m #xf392 Latched Manufacturer Warn Details DTF38X 48 ro c #xf393 Latched Device Error Details DTF38X 48 ro m #xf394 Latched Manufacturer Error Details DTF38X 48 ro c #xf3A1 Device Warning Mask DTF3AX 48 rw m #xf3A2 Manufacturer Warning Mask DTF3AX 48 rw m #xf3A3 Device Error Mask DTF3AX 48 rw m #xf3A4 Manufacturer Error Mask DTF3AX 48 rw m #xf500 Device Information DTF500 32 ro m #xf501 Manufacturing Information DTF501 224 ro m #xf503 Power On Self Test DTF503 528 ro m #xf6f0 Input Latch Local Timestamp DTF600 48 ro m #xf9f0 Manufacturer Serial Number STRING(10) 80 ro m #xf9f1 CDP Functional Generation Number DTF9F1 48 ro m #xf9f2 SDP Functional Generation Number DTF9F2 48 ro m #xf9f3 Vendor Name STRING(7) 56 ro m #xf9f4 Semiconductor SDP Device Name DTF9F4 48 ro m #xf9f5 Output Identifier DTF9F5 24 ro m #xf9f6 Time Since Powered On UDINT 32 ro m #xf9f8 Firmware Update Functional Generation Number UDINT 32 ro m #xfbf0 Device Reset DTFBF0 88 No of elements 03 rw o #xfbf1 Exception Reset Command DTFBF1 80 No of elements 03 rw o #xfbf2 Store Non-Volatile Parameters DTFBF2 72 No of elements 03 rw o #xfbf3 Calculate Checksum DTFBF3 104 No of elements 03 rw o #xfbf4 Load Non-Volatile Parameters DTFBF2 72 No of elements 03 rw o Outputs Inputs MBoxState MBoxOut MBoxIn Outputs Inputs #x1600 MicroComboDigOutRxPDOMap #x3200 1 8 Digital Outputs 1-8 BYTE #x3200 2 8 Digital Outputs 9-16 BYTE #x1601 MicroComboAnOutRxPDOMap #x3400 1 16 Analog Output 1 INT #x3400 2 16 Analog Output 2 INT #x3400 3 16 Analog Output 3 INT #x3400 4 16 Analog Output 4 INT #x1602 UserConfigurableRxPDOMap #x1A00 MicroComboDigInTxPDOMap #x3100 1 8 Digital Inputs 1-8 BYTE #x3100 2 8 Digital Inputs 9-16 BYTE #x1A01 MicroComboAnInTxPDOMap #x3300 1 16 Analog Input 1 INT #x3300 2 16 Analog Input 2 INT #x3300 3 16 Analog Input 3 INT #x3300 4 16 Analog Input 4 INT #x3300 5 16 Analog Input 5 INT #x3300 6 16 Analog Input 6 INT #x3300 7 16 Analog Input 7 INT #x3300 8 16 Analog Input 8 INT #x1A03 UserConfigurableTxPDOMap 25000 100 2048 05060000C40900000000 0010000200180002